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    1.Scheduling Transient Processes for Time-Constrained Single-Arm Robotic Multi-Cluster Tools

    Zhu, QH, Zhou, MC, Q     More...

    IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING[0894-6507], Published 2017, Volume 30, Issue 3, Pages 261-269

    收錄情况: WOS SCOPUS

    WOS核心合集引用: 15  2022影響因子:  2.7  发表年影響因子:  1.336 

    2.Scheduling of Single-Arm Multi-cluster Tools With Wafer Residency Time Constraints in Semiconductor Manufacturing

    Zhu, QH, Wu, NQ, Qia     More...

    IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING[0894-6507], Published 2015, Volume 28, Issue 1, Pages 117-125

    收錄情况: WOS SCOPUS

    WOS核心合集引用: 50  2022影響因子:  2.7  发表年影響因子:  1.045 

    3.Scheduling and Analysis of Start-Up Transient Processes for Dual-Arm Cluster Tools With Wafer Revisiting

    Pan, CR, Qiao, Y, Zh     More...

    IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING[0894-6507], Published 2015, Volume 28, Issue 2, Pages 160-170

    收錄情况: WOS SCOPUS

    WOS核心合集引用: 26  2022影響因子:  2.7  发表年影響因子:  1.045 

    4.Petri Net-Based Optimal One-Wafer Cyclic Scheduling of Hybrid Multi-Cluster Tools in Wafer Fabrication

    Yang, FJ, Wu, NQ, Qi     More...

    IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING[0894-6507], Published 2014, Volume 27, Issue 2, Pages 192-203

    收錄情况: WOS SCOPUS

    WOS核心合集引用: 35  2022影響因子:  2.7  发表年影響因子:  1.000 

    5.How to Respond to Process Module Failure in Residency Time-Constrained Single-Arm Cluster Tools

    Qiao, Y, Wu, NQ, Pan     More...

    IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING[0894-6507], Published 2014, Volume 27, Issue 4, Pages 462-474

    收錄情况: WOS SCOPUS

    WOS核心合集引用: 36  2022影響因子:  2.7  发表年影響因子:  1.000 

    6.Schedule restoration for single-armed cluster tools

    Kim, JaHee, Zhou, Me     More...

    IEEE Transactions on Semiconductor Manufacturing[0894-6507], Published 2014, Volume 27, Issue 3, Pages 388-399

    收錄情况: WOS SCOPUS

    WOS核心合集引用: 25  2022影響因子:  2.7  发表年影響因子:  1.000 

    7.Petri Net-Based Optimal One-Wafer Scheduling of Single-Arm Multi-Cluster Tools in Semiconductor Manufacturing

    Zhu, QH, Wu, NQ, Qia     More...

    IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING[0894-6507], Published 2013, Volume 26, Issue 4, Pages 578-591

    收錄情况: WOS SCOPUS

    WOS核心合集引用: 69  2022影響因子:  2.7  发表年影響因子:  0.977 

    8.A Petri Net-Based Novel Scheduling Approach and Its Cycle Time Analysis for Dual-Arm Cluster Tools With Wafer Revisiting

    Qiao, Y, Wu, NQ, Zho     More...

    IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING[0894-6507], Published 2013, Volume 26, Issue 1, Pages 100-110

    收錄情况: WOS SCOPUS

    WOS核心合集引用: 61  2022影響因子:  2.7  发表年影響因子:  0.977 

    9.Petri Net Modeling and Wafer Sojourn Time Analysis of Single-Arm Cluster Tools With Residency Time Constraints and Activity Time Variation

    Qiao, Y, Wu, NQ, Zho     More...

    IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING[0894-6507], Published 2012, Volume 25, Issue 3, Pages 432-446

    收錄情况: WOS SCOPUS

    WOS核心合集引用: 79  2022影響因子:  2.7  发表年影響因子:  0.862 

    10.Analysis of Wafer Sojourn Time in Dual-Arm Cluster Tools With Residency Time Constraint and Activity Time Variation

    Wu, NQ, Zhou, MC

    IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING[0894-6507], Published 2010, Volume 23, Issue 1, Pages 53-64

    收錄情况: WOS SCOPUS

    WOS核心合集引用: 69  2022影響因子:  2.7  发表年影響因子:  0.748 

    11.A Petri net method for schedulability and scheduling problems in single-arm cluster tools with wafer residency time constraints

    Wu, NQ, Chu, CB, Chu     More...

    IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING[0894-6507], Published 2008, Volume 21, Issue 2, Pages 224-237

    收錄情况: WOS SCOPUS

    WOS核心合集引用: 167  2022影響因子:  2.7  发表年影響因子:  0.957 

    12.Virtual production lines design for back-end semiconductor manufacturing systems

    Tang, Ying, Zhou, Me     More...

    IEEE Transactions on Semiconductor Manufacturing[0894-6507], Published 2003, Volume 16, Issue 3, Pages 543-550

    收錄情况: SCOPUS

    2022影響因子:  2.7  发表年影響因子:  0.785 

    13.Scheduling of semiconductor test facility via petri nets and hybrid heuristic search

    Xiong, Huanxin Henry     More...

    IEEE Transactions on Semiconductor Manufacturing[0894-6507], Published 1998, Volume 11, Issue 3, Pages 384-393

    收錄情况: WOS SCOPUS

    WOS核心合集引用: 122  2022影響因子:  2.7  发表年影響因子:  0.901 

    14.Modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing systems: A petri net approach

    Zhou, MengChu, Jeng,     More...

    IEEE Transactions on Semiconductor Manufacturing[0894-6507], Published 1998, Volume 11, Issue 3, Pages 333-357

    收錄情况: WOS SCOPUS

    WOS核心合集引用: 228  2022影響因子:  2.7  发表年影響因子:  0.901 

    15.Editorial Introduction to the Special Section on Petri Nets in Semiconductor Manufacturing

    Jeng, Mu Der, Zhou,     More...

    IEEE Transactions on Semiconductor Manufacturing[0894-6507], Published 1998, Volume 11, Issue 3, Pages 330-332

    收錄情况: SCOPUS

    2022影響因子:  2.7  发表年影響因子:  0.901 

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