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    1.Scheduling of time constrained dual-arm cluster tools with wafer revisiting

    Qiao, Yan, Wu, Naiqi     More...

    IEEE International Conference on Automation Science and Engineering[2161-8089], Published 2013, Pages 868-873

    收錄情况: SCOPUS

    2.Petri net modeling and one-wafer scheduling of single-arm multi-cluster tools

    Zhu, Qinghua, Wu, Na     More...

    IEEE International Conference on Automation Science and Engineering[2161-8089], Published 2013, Pages 862-867

    收錄情况: SCOPUS

    3.Petri net-based scheduling analysis of dual-arm cluster tools with wafer revisiting

    Qiao, Yan, Wu, Naiqi     More...

    IEEE International Conference on Automation Science and Engineering[2161-8089], Published 2012, Pages 206-211

    收錄情况: SCOPUS

    4.Modeling and analysis of dual-arm cluster tools for wafer fabrication with revisiting

    Qiao, Yan, Wu, NaiQi     More...

    IEEE International Conference on Automation Science and Engineering[2161-8089], Published 2011, Pages 90-95

    收錄情况: SCOPUS

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