1.Petri Net-Based Deadlock Avoidance for Single-arm Cluster Tools with Concurrently Processing Two-type Wafers

Lu, YJ, Pan, CR, Qia     More...

Lu, YJ, Pan, CR, Qiao, Y, Wu, NQ, Chen, YF     Less

2018 IEEE 15TH INTERNATIONAL CONFERENCE ON NETWORKING, SENSING AND CONTROL (ICNSC)[1810-7869], Published 2018, Pages 1-6

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2.Efficient and optimal scheduling of time-constrained hybrid multi-cluster tools in semiconductor industry

Yang, Fajun, Wu, Nai     More...

Yang, Fajun, Wu, Naiqi, Qiao, Yan, Zhou, Mengchu     Less

ICNSC 2016 - 13th IEEE International Conference on Networking, Sensing and Control[1810-7869], Published 2016,

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3.Modeling and Scheduling of Cluster Tools Dealing with Wafer Revisiting: A Brief Review

Pan, CR, Zhou, MC, Q     More...

Pan, CR, Zhou, MC, Qiao, Y, Wu, NQ     Less

2015 IEEE 12TH INTERNATIONAL CONFERENCE ON NETWORKING, SENSING AND CONTROL (ICNSC)[1810-7869], Published 2015, Pages 271-276

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4.Petri Net-based Response Policies to Process Module Failure in Time-constrained Single-arm Cluster Tools

Qiao, Y, Wu, NQ, Pan     More...

Qiao, Y, Wu, NQ, Pan, CR, Zhou, MC     Less

2014 IEEE 11TH INTERNATIONAL CONFERENCE ON NETWORKING, SENSING AND CONTROL (ICNSC)[1810-7869], Published 2014, Pages 144-149

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5.Petri Net-Based Scheduling Analysis of Dual-Arm Cluster Tools Subject to Wafer Revisiting and Residency Time Constraints

Qiao, Y, Wu, NQ, Zho     More...

Qiao, Y, Wu, NQ, Zhou, MC, Dai, QY     Less

2013 10TH IEEE INTERNATIONAL CONFERENCE ON NETWORKING, SENSING AND CONTROL (ICNSC)[1810-7869], Published 2013, Pages 252-257

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