1.Dual-Arm Cluster Tool Scheduling for Reentrant Wafer Flows

Song, Tairan, Qiao,     More...

Song, Tairan, Qiao, Yan, He, Yunfang, Wu, Naiqi, Li, Zhiwu, Liu, Bin     Less

Electronics (Switzerland)[2079-9292], Published 2023, Volume 12, Issue 11,

收錄情况： WOS SCOPUS

WOS核心合集引用: 1  2022影響因子:  2.9 

2.A New Framework of the EAP System in Semiconductor Manufacturing Internet of Things

Song, TR, Qiao, Y, H     More...

Song, TR, Qiao, Y, He, YF, Li, J, Wu, NQ, Liu, B     Less

ELECTRONICS[2079-9292], Published 2023, Volume 12, Issue 18,

收錄情况： WOS SCOPUS

WOS核心合集引用: 0  2022影響因子:  2.9