1.A CLUSTER TOOL APPARATUS AND A METHOD OF CONTROLLING A CLUSTER TOOL APPARATUS

QIAO Yan, ZHOU Mengc     More... QIAO Yan, ZHOU Mengchu, WU Naiqi, LI Zhiwu, ZHU QingHua     Less

專利權人: MACAU UNIVERSITY OF     More... MACAU UNIVERSITY OF SCIENCE AND TECHNOLOGY     Less

申請號: AU2016101706 申請日: 2016/9/22

公開（公告）號: AU2016101706A4 公開（公告）日期: 2016/10/20

IPC分類號: H01L21/02; G05B19/418

法律狀態: 有效

同族信息: AU2016101706A4

2.A CLUSTER TOOL APPARATUS AND A METHOD OF CONTROLLING A CLUSTER TOOL APPARATUS

WU Naiqi, YANG Fajun     More... WU Naiqi, YANG Fajun, QIAO Yan, ZHOU Mengchu, LI Zhiwu     Less

專利權人: MACAU UNIVERSITY OF     More... MACAU UNIVERSITY OF SCIENCE AND TECHNOLOGY     Less

申請號: AU2016101610 申請日: 2016/9/13

公開（公告）號: AU2016101610A4 公開（公告）日期: 2016/10/13

IPC分類號: H01L21/67

法律狀態: 有效

同族信息: AU2016101610A4

3.A SYSTEM AND METHOD FOR DETERMINING AN OPTIMIZED SCHEDULE OF A PRODUCTION LINE

WU Naiqi, YANG Fajun     More... WU Naiqi, YANG Fajun, QIAO Yan, ZHOU Mengchu     Less

專利權人: Macau University of     More... Macau University of Science and Technology     Less

申請號: AU2015101569 申請日: 2015/10/22

公開（公告）號: AU2015101569A4 公開（公告）日期: 2015/11/26

IPC分類號: G05B19/418

法律狀態: 有效

同族信息: AU2015101569A4

4.Optimization of Start-up Transient Processes for Dual-Armed Cluster Tools with Wafer Revisiting

WU Naiqi, ZHOU Mengc     More... WU Naiqi, ZHOU Mengchu, PAN Churong, QIAO Yan     Less

專利權人: Macau University of     More... Macau University of Science and Technology     Less

申請號: AU2015100137 申請日: 2015/2/7

公開（公告）號: AU2015100137A4 公開（公告）日期: 2015/3/5

IPC分類號: G06F9/00; H01L21/00

法律狀態: 有效

同族信息: AU2015100137A4; US9333645B1

5.ONE-WAFER CYCLIC SCHEDULING OF SINGLE-ARM MULTI-CLUSTER TOOLS WITH TWO-SPACE BUFFERING MODULES

WU NaiQi, YANG FaJun     More... WU NaiQi, YANG FaJun, QIAO Yan, ZHOU MengChu     Less

專利權人: MACAU UNIVERSITY OF     More... MACAU UNIVERSITY OF SCIENCE AND TECHNOLOGY     Less

申請號: AU2014100513 申請日: 2014/5/19

公開（公告）號: AU2014100513A4 公開（公告）日期: 2014/7/10

IPC分類號: H01L21/02

法律狀態: 授权后失效

同族信息: AU2014100513A4

6.ONE-WAFER CYCLIC SCHEDULING OF HYBRID MULTI-CLUSTER TOOLS IN SEMICONDUCTOR MANUFACTURING

WU NaiQi, YANG FaJun     More... WU NaiQi, YANG FaJun, QIAO Yan, ZHOU MengChu     Less

專利權人: MACAU UNIVERSITY OF     More... MACAU UNIVERSITY OF SCIENCE AND TECHNOLOGY     Less

申請號: AU2014100514 申請日: 2014/5/19

公開（公告）號: AU2014100514A4 公開（公告）日期: 2014/7/10

IPC分類號: H01L21/02; G05B19/00

法律狀態: 授权后失效

同族信息: AU2014100514A4

7.ONE-WAFER CYCLIC SCHEDULING FOR TIME CONSTRAINED PROCESS-DOMINANT MULTI-CLUSTER TOOLS

WU NaiQi, YANG FaJun     More... WU NaiQi, YANG FaJun, QIAO Yan     Less

專利權人: MACAU UNIVERSITY OF     More... MACAU UNIVERSITY OF SCIENCE AND TECHNOLOGY     Less

申請號: AU2014100480 申請日: 2014/5/9

公開（公告）號: AU2014100480A4 公開（公告）日期: 2014/6/26

IPC分類號: H01L21/67; H01L21/02

法律狀態: 授权后失效

同族信息: AU2014100480A4

8.A METHOD FOR RESPONDING TO PROCESS MODULE FAILURE IN RESIDENCY TIME-CONSTRAINED SINGLE-ARM CLUSTER TOOLS

WU NaiQi, QIAO Yan,     More... WU NaiQi, QIAO Yan, ZHOU MengChu     Less

專利權人: MACAU UNIVERSITY OF     More... MACAU UNIVERSITY OF SCIENCE AND TECHNOLOGY     Less

申請號: AU2014100522 申請日: 2014/5/20

公開（公告）號: AU2014100522A4 公開（公告）日期: 2014/6/26

IPC分類號: G06F17/00; B25J9/16; G05B13/04; G05B19/418; G05G19/00; H01L21/67

法律狀態: 授权后失效

同族信息: AU2014100522A4

9.CLUSTER TOOL APPARATUS AND A METHOD OF CONTROLLING A CLUSTER TOOL APPARATUS

Yan Qiao, Mengchu Zh     More... Yan Qiao, Mengchu Zhou, Naiqi Wu, Zhiwu Li, Qinghua Zhu     Less

專利權人: Macau University of     More... Macau University of Science and Technology     Less

申請號: US15272706 申請日: 2016/9/22

公開（公告）號: US20180082878A1 公開（公告）日期: 2018/3/22

IPC分類號: H01L21/677

法律狀態: 授权

同族信息: US20180082878A1; US10134613B2

10.CLUSTER TOOL APPARATUS AND A METHOD OF CONTROLLING A CLUSTER TOOL APPARATUS

Naiqi Wu, Fajun Yang     More... Naiqi Wu, Fajun Yang, Yan Qiao, Mengchu Zhou, Zhiwu Li     Less

專利權人: Macau University of     More... Macau University of Science and Technology     Less

申請號: US15263615 申請日: 2016/9/13

公開（公告）號: US20180076064A1 公開（公告）日期: 2018/3/15

IPC分類號: H01L21/67; B25J9/16; H01L21/677

法律狀態: 授权

同族信息: US20180076064A1; US10643873B2

11.Method for scheduling single-arm cluster tools with wafer revisiting and residency time constraints

Naiqi Wu, Fajun Yang     More... Naiqi Wu, Fajun Yang, Yan Qiao, MengChu Zhou     Less

專利權人: Macau University of     More... Macau University of Science and Technology     Less

申請號: US14639980 申請日: 2015/3/5

公開（公告）號: US9223307B1 公開（公告）日期: 2015/12/29

IPC分類號: G06F19/00; B25J9/00; G05B19/418; G06F17/50

法律狀態: 有效

同族信息: US9223307B1; AU2015100138A4

12.Method for Scheduling Single-arm Cluster Tools with Wafer Revisiting and Residency Time Constraints

WU Naiqi, YANG Fajun     More... WU Naiqi, YANG Fajun, YAN Qiao, ZHOU Mengchu     Less

專利權人: Macau University of     More... Macau University of Science and Technology     Less

申請號: AU2015100138 申請日: 2015/2/7

公開（公告）號: AU2015100138A4 公開（公告）日期: 2015/3/5

IPC分類號: H01L21/67; H01L21/00; H01L21/302

法律狀態: 授权后失效

同族信息: US9223307B1; AU2015100138A4

13.Method for Scheduling Single-arm Cluster Tools with Wafer Revisiting and Residency Time Constraints

Naiqi Wu, Fajun Ya     More... Naiqi Wu, Fajun Yang, Yan Qiao, Mengchu Zhou     Less

專利權人: Macau University of     More... Macau University of Science and Technology     Less

申請號: US62102112 申請日: 2015/1/12

公開（公告）號: US62102112P0

法律狀態: 失效

同族信息: US62102112P0

14.Optimal One-Wafer Scheduling of Single-Arm Multi-Cluster Tools with Tree-Like Topology

Naiqi Wu, Qinghua Zh     More... Naiqi Wu, Qinghua Zhu, Yan Qiao, Mengchu Zhou     Less

專利權人: Macau University of     More... Macau University of Science and Technology     Less

申請號: US14918577 申請日: 2015/10/21

公開（公告）號: US20170083008A1 公開（公告）日期: 2017/3/23

IPC分類號: G05B19/418

法律狀態: 授权

同族信息: US10001773B2; US20170083008A1

15.Optimally Scheduling of Close-down Process for Single-arm Cluster Tools with Wafer Residency Time Constraints

Naiqi Wu, Qinghua Zh     More... Naiqi Wu, Qinghua Zhu, Mengchu Zhou, Yan Qiao     Less

專利權人: Macau University of     More... Macau University of Science and Technology     Less

申請號: US14918564 申請日: 2015/10/21

公開（公告）號: US20170083010A1 公開（公告）日期: 2017/3/23

IPC分類號: G05B19/418

法律狀態: 授权

同族信息: US20170083010A1; US10001772B2

16.Optimally Scheduling of Close-down Process for Single-arm Cluster Tools with Wafer Residency Time Constraints

Naiqi Wu, Qinghua     More... Naiqi Wu, Qinghua Zhu, Mengchu Zhou, Yan Qiao     Less

專利權人: Macau University of     More... Macau University of Science and Technology     Less

申請號: US62221027 申請日: 2015/9/20

公開（公告）號: US62221027P0

法律狀態: 失效

同族信息: US62221027P0

17.Optimization of Start-up Transient Processes for Dual-Armed Cluster Tools with Wafer Revisiting

Naiqi Wu, Mengchu     More... Naiqi Wu, Mengchu Zhou, Churong Pan, Yan Qiao     Less

專利權人: Macau University of     More... Macau University of Science and Technology     Less

申請號: US62102111 申請日: 2015/1/12

公開（公告）號: US62102111P0

法律狀態: 失效

同族信息: US62102111P0

18.Petri Net-Based Optimal One-Wafer Cyclic Scheduling of Treelike Hybrid Multi-Cluster Tools

Naiqi Wu, Fajun Yang     More... Naiqi Wu, Fajun Yang, Yan Qiao, Mengchu Zhou     Less

專利權人: Macau University of     More... Macau University of Science and Technology     Less

申請號: US14919720 申請日: 2015/10/21

公開（公告）號: US20170083009A1 公開（公告）日期: 2017/3/23

IPC分類號: G05B19/418

法律狀態: 授权

同族信息: US10073444B2; US20170083009A1

19.Scheduling Start-up Process for Time-constrained Single-arm Cluster Tools

Naiqi Wu, Yan Qiao,     More... Naiqi Wu, Yan Qiao, Mengchu Zhou     Less

專利權人: Macau University of     More... Macau University of Science and Technology     Less

申請號: US14918557 申請日: 2015/10/20

公開（公告）號: US20170080563A1 公開（公告）日期: 2017/3/23

IPC分類號: B25J9/16; H01L21/67; H01L21/677; H01L21/68

法律狀態: 有效

同族信息: US20170080563A1; US9618930B1

20.SYSTEM AND METHOD FOR DETERMINING AN OPTIMIZED SCHEDULE OF A PRODUCTION LINE

Naiqi Wu, Fajun Yang     More... Naiqi Wu, Fajun Yang, Yan Qiao, Mengchu Zhou     Less

專利權人: Macau University of     More... Macau University of Science and Technology     Less

申請號: US14920026 申請日: 2015/10/22

公開（公告）號: US20170115651A1 公開（公告）日期: 2017/4/27

IPC分類號: G05B19/042; G05B15/02

法律狀態: 授权

同族信息: US10101721B2; US20170115651A1