潘春荣,伍乃骐
系统仿真学报[1004-731X], Published 2009, Issue 02, Pages 554-557+562
收錄情况: CNKI
2.Modeling and simulation of single-arm cluster tool in wafer fabrication
Pan, ChunRong, Wu, N More...
Xitong Fangzhen Xuebao / Journal of System Simulation[1004-731X], Published 2009, Volume 21, Issue 2,
收錄情况: SCOPUS
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