1.Petri Net-Based Optimal One-Wafer Scheduling of Single-Arm Multi-Cluster Tools in Semiconductor Manufacturing

Zhu, QH, Wu, NQ, Qia     More...

Zhu, QH, Wu, NQ, Qiao, Y, Zhou, MC     Less

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING[0894-6507], Published 2013, Volume 26, Issue 4, Pages 578-591

收錄情况： WOS SCOPUS

WOS核心合集引用: 72  2023影響因子:  2.3  发表年影響因子:  0.977 

2.Petri Net-Based Optimal One-Wafer Cyclic Scheduling of Hybrid Multi-Cluster Tools in Wafer Fabrication

Yang, FJ, Wu, NQ, Qi     More...

Yang, FJ, Wu, NQ, Qiao, Y, Zhou, MC     Less

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING[0894-6507], Published 2014, Volume 27, Issue 2, Pages 192-203

收錄情况： WOS SCOPUS

WOS核心合集引用: 35  2023影響因子:  2.3  发表年影響因子:  1.000 

3.How to Respond to Process Module Failure in Residency Time-Constrained Single-Arm Cluster Tools

Qiao, Y, Wu, NQ, Pan     More...

Qiao, Y, Wu, NQ, Pan, CR, Zhou, MC     Less

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING[0894-6507], Published 2014, Volume 27, Issue 4, Pages 462-474

收錄情况： WOS SCOPUS

WOS核心合集引用: 36  2023影響因子:  2.3  发表年影響因子:  1.000 

4.Scheduling of Single-Arm Multi-cluster Tools With Wafer Residency Time Constraints in Semiconductor Manufacturing

Zhu, QH, Wu, NQ, Qia     More...

Zhu, QH, Wu, NQ, Qiao, Y, Zhou, MC     Less

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING[0894-6507], Published 2015, Volume 28, Issue 1, Pages 117-125

收錄情况： WOS SCOPUS

WOS核心合集引用: 55  2023影響因子:  2.3  发表年影響因子:  1.045 

5.Scheduling and Analysis of Start-Up Transient Processes for Dual-Arm Cluster Tools With Wafer Revisiting

Pan, CR, Qiao, Y, Zh     More...

Pan, CR, Qiao, Y, Zhou, MC, Wu, NQ     Less

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING[0894-6507], Published 2015, Volume 28, Issue 2, Pages 160-170

收錄情况： WOS SCOPUS

WOS核心合集引用: 28  2023影響因子:  2.3  发表年影響因子:  1.045 

6.Scheduling Transient Processes for Time-Constrained Single-Arm Robotic Multi-Cluster Tools

Zhu, QH, Zhou, MC, Q     More...

Zhu, QH, Zhou, MC, Qiao, Y, Wu, NQ     Less

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING[0894-6507], Published 2017, Volume 30, Issue 3, Pages 261-269

收錄情况： WOS SCOPUS

WOS核心合集引用: 15  2023影響因子:  2.3  发表年影響因子:  1.336 

7.A Petri net method for schedulability and scheduling problems in single-arm cluster tools with wafer residency time constraints

Wu, NQ, Chu, CB, Chu     More...

Wu, NQ, Chu, CB, Chu, F, Zhou, MC     Less

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING[0894-6507], Published 2008, Volume 21, Issue 2, Pages 224-237

收錄情况： WOS SCOPUS

WOS核心合集引用: 176  2023影響因子:  2.3  发表年影響因子:  0.957 

8.Analysis of Wafer Sojourn Time in Dual-Arm Cluster Tools With Residency Time Constraint and Activity Time Variation

Wu, NQ, Zhou, MC     More...

Wu, NQ, Zhou, MC     Less

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING[0894-6507], Published 2010, Volume 23, Issue 1, Pages 53-64

收錄情况： WOS SCOPUS

WOS核心合集引用: 71  2023影響因子:  2.3  发表年影響因子:  0.748 

9.Petri Net Modeling and Wafer Sojourn Time Analysis of Single-Arm Cluster Tools With Residency Time Constraints and Activity Time Variation

Qiao, Y, Wu, NQ, Zho     More...

Qiao, Y, Wu, NQ, Zhou, MC     Less

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING[0894-6507], Published 2012, Volume 25, Issue 3, Pages 432-446

收錄情况： WOS SCOPUS

WOS核心合集引用: 86  2023影響因子:  2.3  发表年影響因子:  0.862 

10.A Petri Net-Based Novel Scheduling Approach and Its Cycle Time Analysis for Dual-Arm Cluster Tools With Wafer Revisiting

Qiao, Y, Wu, NQ, Zho     More...

Qiao, Y, Wu, NQ, Zhou, MC     Less

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING[0894-6507], Published 2013, Volume 26, Issue 1, Pages 100-110

收錄情况： WOS SCOPUS

WOS核心合集引用: 65  2023影響因子:  2.3  发表年影響因子:  0.977 

11.Scheduling of semiconductor test facility via petri nets and hybrid heuristic search

Xiong, Huanxin Henry     More...

Xiong, Huanxin Henry, Zhou, MengChu     Less

IEEE Transactions on Semiconductor Manufacturing[0894-6507], Published 1998, Volume 11, Issue 3, Pages 384-393

收錄情况： WOS SCOPUS

WOS核心合集引用: 124  2023影響因子:  2.3  发表年影響因子:  0.901 

12.Modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing systems: A petri net approach

Zhou, MengChu, Jeng,     More...

Zhou, MengChu, Jeng, Mu Der     Less

IEEE Transactions on Semiconductor Manufacturing[0894-6507], Published 1998, Volume 11, Issue 3, Pages 333-357

收錄情况： WOS SCOPUS

WOS核心合集引用: 232  2023影響因子:  2.3  发表年影響因子:  0.901 

13.Virtual production lines design for back-end semiconductor manufacturing systems

Tang, Ying, Zhou, Me     More...

Tang, Ying, Zhou, MengChu, Qiu, Robin G.     Less

IEEE Transactions on Semiconductor Manufacturing[0894-6507], Published 2003, Volume 16, Issue 3, Pages 543-550

收錄情况： SCOPUS

2023影響因子:  2.3  发表年影響因子:  0.785 

14.Schedule restoration for single-armed cluster tools

Kim, JaHee, Zhou, Me     More...

Kim, JaHee, Zhou, Mengchu, Lee, TaeEog     Less

IEEE Transactions on Semiconductor Manufacturing[0894-6507], Published 2014, Volume 27, Issue 3, Pages 388-399

收錄情况： WOS SCOPUS

WOS核心合集引用: 26  2023影響因子:  2.3  发表年影響因子:  1.000 

15.Editorial Introduction to the Special Section on Petri Nets in Semiconductor Manufacturing

Jeng, Mu Der, Zhou,     More...

Jeng, Mu Der, Zhou, Mengchu     Less

IEEE Transactions on Semiconductor Manufacturing[0894-6507], Published 1998, Volume 11, Issue 3, Pages 330-332

收錄情况： SCOPUS

2023影響因子:  2.3  发表年影響因子:  0.901