1.Cycle time analysis of dual-arm cluster tools for wafer fabrication processes with multiple wafer revisiting times

Qiao, Y, Wu, NQ, Zhu     More...

Qiao, Y, Wu, NQ, Zhu, QH, Bai, LP     Less

COMPUTERS & OPERATIONS RESEARCH[0305-0548], Published 2015, Volume 53, Pages 252-260

收錄情况： WOS SCOPUS

WOS核心合集引用: 38  2025影響因子:  4.6  发表年影響因子:  1.988 

2.Optimization on multiple-time reentrant process of robotic cluster tools with parallel process modules and chamber cleaning operations

Lai, YM, Shao, YH, G     More...

Lai, YM, Shao, YH, Ghahramani, M, He, YF, Qiao, Y     Less

COMPUTERS & OPERATIONS RESEARCH[0305-0548], Published 2026, Volume 195,

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WOS核心合集引用: 0  2025影響因子:  4.6