排序方式:
    總頁 1 
      Go

    1.Wafer Reflectance Prediction for Complex Etching Process Based on K-Means Clustering and Neural Network

    Xiong, Wen Qing, Qia     More...

    IEEE Transactions on Semiconductor Manufacturing[0894-6507], Published 2021, Volume 34, Issue 2, Pages 207-216

    收錄情况: WOS SCOPUS

    WOS核心合集引用:  2022影響因子:  2.7  发表年影響因子:  2.796 

    2.Efficient Approach to Cyclic Scheduling of Single-Arm Cluster Tools With Chamber Cleaning Operations and Wafer Residency Time Constraint

    Yang, FJ, Wu, NQ, Ga     More...

    IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING[0894-6507], Published 2018, Volume 31, Issue 2, Pages 196-205

    收錄情况: WOS SCOPUS

    WOS核心合集引用: 15  2022影響因子:  2.7  发表年影響因子:  1.140 

    3.Scheduling Transient Processes for Time-Constrained Single-Arm Robotic Multi-Cluster Tools

    Zhu, QH, Zhou, MC, Q     More...

    IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING[0894-6507], Published 2017, Volume 30, Issue 3, Pages 261-269

    收錄情况: WOS SCOPUS

    WOS核心合集引用: 15  2022影響因子:  2.7  发表年影響因子:  1.336 

    4.Scheduling of Single-Arm Multi-cluster Tools With Wafer Residency Time Constraints in Semiconductor Manufacturing

    Zhu, QH, Wu, NQ, Qia     More...

    IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING[0894-6507], Published 2015, Volume 28, Issue 1, Pages 117-125

    收錄情况: WOS SCOPUS

    WOS核心合集引用: 49  2022影響因子:  2.7  发表年影響因子:  1.045 

    5.Scheduling and Analysis of Start-Up Transient Processes for Dual-Arm Cluster Tools With Wafer Revisiting

    Pan, CR, Qiao, Y, Zh     More...

    IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING[0894-6507], Published 2015, Volume 28, Issue 2, Pages 160-170

    收錄情况: WOS SCOPUS

    WOS核心合集引用: 26  2022影響因子:  2.7  发表年影響因子:  1.045 

    6.Petri Net-Based Optimal One-Wafer Cyclic Scheduling of Hybrid Multi-Cluster Tools in Wafer Fabrication

    Yang, FJ, Wu, NQ, Qi     More...

    IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING[0894-6507], Published 2014, Volume 27, Issue 2, Pages 192-203

    收錄情况: WOS SCOPUS

    WOS核心合集引用: 35  2022影響因子:  2.7  发表年影響因子:  1.000 

    7.How to Respond to Process Module Failure in Residency Time-Constrained Single-Arm Cluster Tools

    Qiao, Y, Wu, NQ, Pan     More...

    IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING[0894-6507], Published 2014, Volume 27, Issue 4, Pages 462-474

    收錄情况: WOS SCOPUS

    WOS核心合集引用: 36  2022影響因子:  2.7  发表年影響因子:  1.000 

    8.A Petri Net-Based Novel Scheduling Approach and Its Cycle Time Analysis for Dual-Arm Cluster Tools With Wafer Revisiting

    Qiao, Y, Wu, NQ, Zho     More...

    IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING[0894-6507], Published 2013, Volume 26, Issue 1, Pages 100-110

    收錄情况: WOS SCOPUS

    WOS核心合集引用: 61  2022影響因子:  2.7  发表年影響因子:  0.977 

    9.Petri Net-Based Optimal One-Wafer Scheduling of Single-Arm Multi-Cluster Tools in Semiconductor Manufacturing

    Zhu, QH, Wu, NQ, Qia     More...

    IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING[0894-6507], Published 2013, Volume 26, Issue 4, Pages 578-591

    收錄情况: WOS SCOPUS

    WOS核心合集引用: 68  2022影響因子:  2.7  发表年影響因子:  0.977 

    10.Petri Net Modeling and Wafer Sojourn Time Analysis of Single-Arm Cluster Tools With Residency Time Constraints and Activity Time Variation

    Qiao, Y, Wu, NQ, Zho     More...

    IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING[0894-6507], Published 2012, Volume 25, Issue 3, Pages 432-446

    收錄情况: WOS SCOPUS

    WOS核心合集引用: 79  2022影響因子:  2.7  发表年影響因子:  0.862 

    顯示      條  合計   10   條
      總頁 1 
        Go

      本系統需要使用 Internet Explorer 9.0 以上Firefox || Chrome瀏覽器

      Copyright © 2018 澳門科技大學學者庫