1.(Digital twin) Wafer sojourn time fluctuation analysis for time-constrained dual-arm multi-cluster tools with activity time variation
Yang, FJ, Wu, NQ, Qi
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Yang, FJ, Wu, NQ, Qiao, Y, Su, R, Zhang, CJ
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INTERNATIONAL JOURNAL OF COMPUTER INTEGRATED MANUFACTURING[0951-192X],
Published 2020,
Volume 34,
Issue 7-8,
Pages 734-751
收錄情况:
WOS
SCOPUS
WOS核心合集引用: 7
2023影響因子:
3.7
发表年影響因子:
3.205