1.Scheduling of Single-Arm Multi-Cluster Tools to Achieve the Minimum Cycle Time

Zhu, QH, Wu, NQ, Qia     More...

Zhu, QH, Wu, NQ, Qiao, Y, Zhou, MC     Less

2013 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND AUTOMATION (ICRA)[1050-4729], Published 2013, Pages 3555-3560

收錄情况： WOS SCOPUS

WOS核心合集引用: 11 

2.Optimal One-Wafer Cyclic Scheduling Analysis of Hybrid Multi-Cluster Tools With One-Space Buffering Module

Yang, FJ, Wu, NQ, Qi     More...

Yang, FJ, Wu, NQ, Qiao, Y, Zhou, MC     Less

2014 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND AUTOMATION (ICRA)[1050-4729], Published 2014, Pages 3279-3284

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WOS核心合集引用: 1 

3.Petri net-based real-time scheduling of time-constrained single-arm cluster tools with activity time variation

Yan Qiao , NaiQi Wu      More...

Yan Qiao , NaiQi Wu , MengChu Zhou     Less

2012 IEEE International Conference on Robotics and Automation[1050-4729], Published 2012, Pages 5056-5061

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WOS核心合集引用: 1 

4.Close-down process scheduling of wafer residence time-constrained multi-cluster tools

Zhu, Qinghua, Zhou,     More...

Zhu, Qinghua, Zhou, Mengchu, Qiao, Yan, Wu, Naiqi     Less

Proceedings - IEEE International Conference on Robotics and Automation[1050-4729], Published 2017, Pages 543-548

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