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    1.Real-Time Scheduling of Single-Arm Cluster Tools Subject to Residency Time Constraints and Bounded Activity Time Variation

    Qiao, Y, Wu, NQ, Zho     More...

    IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING[1545-5955], Published 2012, Volume 9, Issue 3, Pages 564-577

    收錄情况: WOS SCOPUS

    WOS核心合集引用: 82  2023影響因子:  5.9  发表年影響因子:  1.674 

    2.Response Policies to Process Module Failure in Single-Arm Cluster Tools Subject to Wafer Residency Time Constraints

    Qiao, Y, Pan, CR, Wu     More...

    IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING[1545-5955], Published 2015, Volume 12, Issue 3, Pages 1125-1139

    收錄情况: WOS SCOPUS

    WOS核心合集引用: 39  2023影響因子:  5.9  发表年影響因子:  2.696 

    3.Scheduling Cluster Tools in Semiconductor Manufacturing: Recent Advances and Challenges

    Pan, CR, Zhou, MC, Q     More...

    IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING[1545-5955], Published 2018, Volume 15, Issue 2, Pages 586-601

    收錄情况: WOS SCOPUS

    WOS核心合集引用: 79  2023影響因子:  5.9  发表年影響因子:  5.224 

    4.Reducing Wafer Delay Time by Robot Idle Time Regulation for Single-Arm Cluster Tools

    Xiong, WQ, Pan, CR,     More...

    IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING[1545-5955], Published 2021, Volume 18, Issue 4, Pages 1653-1667

    收錄情况: WOS SCOPUS

    WOS核心合集引用: 32  2023影響因子:  5.9  发表年影響因子:  6.636 

    5.An Efficient Binary Integer Programming Model for Residency Time-Constrained Cluster Tools With Chamber Cleaning Requirements

    Qiao, Y, Lu, YN, Li,     More...

    IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING[1545-5955], Published 2021, Volume 19, Issue 3, Pages 1757-1771

    收錄情况: WOS SCOPUS

    WOS核心合集引用: 17  2023影響因子:  5.9  发表年影響因子:  6.636 

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