1.Reducing Wafer Delay Time by Robot Idle Time Regulation for Single-Arm Cluster Tools
Xiong, WQ, Pan, CR, More...
IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING[1545-5955], Published 2021, Volume 18, Issue 4, Pages 1653-1667
收錄情况: WOS SCOPUS
WOS核心合集引用: 32 2023影響因子: 5.9 发表年影響因子: 6.636
Qiao, Y, Lu, YN, Li, More...
IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING[1545-5955], Published 2021, Volume 19, Issue 3, Pages 1757-1771
收錄情况: WOS SCOPUS
WOS核心合集引用: 17 2023影響因子: 5.9 发表年影響因子: 6.636
3.Scheduling Cluster Tools in Semiconductor Manufacturing: Recent Advances and Challenges
Pan, CR, Zhou, MC, Q More...
IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING[1545-5955], Published 2018, Volume 15, Issue 2, Pages 586-601
收錄情况: WOS SCOPUS
WOS核心合集引用: 80 2023影響因子: 5.9 发表年影響因子: 5.224
Qiao, Y, Pan, CR, Wu More...
IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING[1545-5955], Published 2015, Volume 12, Issue 3, Pages 1125-1139
收錄情况: WOS SCOPUS
WOS核心合集引用: 39 2023影響因子: 5.9 发表年影響因子: 2.696
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