1.AN EFFECTIVE SCHEDULING METHOD TO SINGLE-ARM CLUSTER TOOLS FOR PROCESSING MULTIPLE WAFER TYPES
Lu, Yanjun, Li, Jie, More...
Journal of Industrial and Management Optimization[1547-5816], Published 2023, Volume 19, Issue 6, Pages 4450-4480
收錄情况: WOS SCOPUS
WOS核心合集引用: 3 2023影響因子: 1.2 发表年影響因子: 1.2
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