1.Dual-Arm Cluster Tool Scheduling for Reentrant Wafer Flows
Song, Tairan, Qiao, More...
Electronics (Switzerland)[2079-9292], Published 2023, Volume 12, Issue 11,
收錄情况: WOS SCOPUS
WOS核心合集引用: 2 2023影響因子: 2.6 发表年影響因子: 2.6
2.A New Framework of the EAP System in Semiconductor Manufacturing Internet of Things
Song, TR, Qiao, Y, H More...
ELECTRONICS[2079-9292], Published 2023, Volume 12, Issue 18,
收錄情况: WOS SCOPUS
WOS核心合集引用: 0 2023影響因子: 2.6 发表年影響因子: 2.6
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