1.Petri Net Modeling and One-Wafer Scheduling of Single-Arm Tree-like Multi-Cluster Tools

Zhu, QH, Qiao, Y, Zh     More...

Zhu, QH, Qiao, Y, Zhou, MC     Less

2015 INTERNATIONAL CONFERENCE ON AUTOMATION SCIENCE AND ENGINEERING (CASE)[2161-8070], Published 2015, Volume 2015-October, Pages 292-297

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2.How to Start-up Dual-arm Cluster Tools Involving a Wafer Revisiting Process

Pan, CR, Zhou, MC, Q     More...

Pan, CR, Zhou, MC, Qiao, Y     Less

2015 INTERNATIONAL CONFERENCE ON AUTOMATION SCIENCE AND ENGINEERING (CASE)[2161-8070], Published 2015, Volume 2015-October, Pages 1194-1199

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3.Cyclic scheduling analysis of single-arm cluster tools with wafer residency time constraint and chamber cleaning operations

FaJun Yang , NaiQi W     More...

FaJun Yang , NaiQi Wu , Rong Su , Yan Qiao     Less

2018 IEEE 14th International Conference on Automation Science and Engineering (CASE)[2161-8070], Published 2018, Volume 2018-August, Pages 241-246

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4.Optimal scheduling analysis of treelike hybrid multi-cluster tools

Yang, Fajun, Wu, Nai     More...

Yang, Fajun, Wu, Naiqi, Qiao, Yan, Zhou, Mengchu     Less

IEEE International Conference on Automation Science and Engineering[2161-8070], Published 2016, Volume 2016-November, Pages 1400-1404

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5.Optimizing close-down processes of single-robot cluster tools via linear programing

Qiao, Yan, Wu, Naiqi     More...

Qiao, Yan, Wu, Naiqi, Li, Zhiwu, Zhou, Mengchu, Zhu, Qinghua     Less

IEEE International Conference on Automation Science and Engineering[2161-8070], Published 2016, Volume 2016-November, Pages 148-153

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6.Modeling and schedulability analysis of single-arm multi-cluster tools with residency time constraints via Petri nets

Zhu, Qinghua, Wu, Na     More...

Zhu, Qinghua, Wu, Naiqi, Qiao, Yan, Zhou, Mengchu     Less

IEEE International Conference on Automation Science and Engineering[2161-8070], Published 2014, Volume 2014-January, Pages 81-86

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7.Optimal scheduling of single-arm multi-cluster tools with two-space buffering modules

Yang, Fajun, Wu, Nai     More...

Yang, Fajun, Wu, Naiqi, Qiao, Yan, Zhou, Mengchu     Less

IEEE International Conference on Automation Science and Engineering[2161-8070], Published 2014, Volume 2014-January, Pages 75-80

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8.Bi-modal Traffic Management Integrating Perimeter Control and Regional Bus Service Frequency Setting

Chen, Saifei, Wu, Na     More...

Chen, Saifei, Wu, Naiqi, Qiao, Yan, Fu, Hui, Wang, Yefei     Less

IEEE International Conference on Automation Science and Engineering[2161-8070], Published 2020, Volume 2020-August, Pages 254-259

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9.Efficient Approach to Scheduling of High Throughput Screening Systems: A Case Study

Wu, NQ, Qiao, Y, Li,     More...

Wu, NQ, Qiao, Y, Li, ZW     Less

2022 IEEE 18TH INTERNATIONAL CONFERENCE ON AUTOMATION SCIENCE AND ENGINEERING (CASE)[2161-8070], Published 2022, Volume 2022-August, Pages 1634-1639

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10.An Adaptive Method for Flexible Configurations of Single-Arm Cluster Tools: Modeling and Scheduling

Xiong, WQ, Qiao, Y,     More...

Xiong, WQ, Qiao, Y, Bai, LP, Huang, BY, Wu, NQ, Zhang, SW     Less

2022 IEEE 18TH INTERNATIONAL CONFERENCE ON AUTOMATION SCIENCE AND ENGINEERING (CASE)[2161-8070], Published 2022, Volume 2022-August, Pages 1872-1877

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11.Scheduling Analysis of Diffusion Area in Semiconductor Manufacturing

Chen, Liang Chao, Qi     More...

Chen, Liang Chao, Qiao, Yan, Wu, Nai Qi, Zhang, Si Wei, Li, Jie, Liu, Bin     Less

IEEE International Conference on Automation Science and Engineering[2161-8070], Published 2023, Volume 2023-August,

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