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    1.Optimally Scheduling Dual-Arm Multi-Cluster Tools to Process Two Wafer Types

    Zhu, QH, Wang, GH, H     More...

    IEEE ROBOTICS AND AUTOMATION LETTERS[2377-3766], Published 2022, Volume 7, Issue 3, Pages 5920-5927

    收錄情况: WOS SCOPUS

    WOS核心合集引用: 13  2023影響因子:  4.6  发表年影響因子:  5.2 

    2.Scheduling of Time-Constrained Single-Arm Cluster Tools with Two-Space Process Modules in Semiconductor Manufacturing

    Zou, CY, Wang, GH, G     More...

    IEEE ROBOTICS AND AUTOMATION LETTERS[2377-3766], Published 2024, Volume 9, Issue 7, Pages 6352-6359

    收錄情况: WOS SCOPUS

    WOS核心合集引用:  2023影響因子:  4.6 

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