1.Scheduling and Control of Start-up Process for Time-Constrained Single-Arm Cluster Tools with Parallel Chambers

Yang, FJ, Qiao, Y, G     More...

Yang, FJ, Qiao, Y, Gao, KZ, Wu, NQ, Zhu, YT, Simon, IW, Su, R     Less

IFAC PAPERSONLINE[2405-8963], Published 2018, Volume 51, Issue 7, Pages 251-256

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2.Robot Waiting Time Analysis and Its Impact on Wafer Delay Time of Single-Arm Cluster Tools

Xiong, WQ, Qiao, Y,     More...

Xiong, WQ, Qiao, Y, Wu, NQ, Bai, LP, Chen, MX, Hsieh, PH, Yin, L     Less

IFAC PAPERSONLINE[2405-8963], Published 2020, Volume 53, Issue 4, Pages 384-389

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