1.Cycle time analysis of dual-arm cluster tools for wafer fabrication processes with multiple wafer revisiting times
Qiao, Y, Wu, NQ, Zhu
More...
Qiao, Y, Wu, NQ, Zhu, QH, Bai, LP
Less
COMPUTERS & OPERATIONS RESEARCH[0305-0548],
Published 2015,
Volume 53,
Pages 252-260
收錄情况:
WOS
SCOPUS
WOS核心合集引用: 30
2023影響因子:
4.1
发表年影響因子:
1.988