1.Optimally Scheduling Single-Arm Multicluster Tools for Manufacturing Hybrid-Type Wafers

Wang, Genghong, Zhu,     More...

Wang, Genghong, Zhu, Qinghua, Hou, Yan, Qiao, Yan, Wu, Naiqi, Zhou, Mengchu     Less

Conference Proceedings - IEEE International Conference on Systems, Man and Cybernetics[1062-922X], Published 2023, Pages 3379-3384

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2.Scheduling Close-down Processes Subject to Wafer Residency Constraints for Singlearm Cluster Tools

Zhu, QH, Zhou, MC, Q     More...

Zhu, QH, Zhou, MC, Qiao, Y, Wu, NQ     Less

2015 IEEE INTERNATIONAL CONFERENCE ON SYSTEMS, MAN, AND CYBERNETICS (SMC 2015): BIG DATA ANALYTICS FOR HUMAN-CENTRIC SYSTEMS[1062-922X], Published 2015, Pages 521-526

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3.A Novel Failure Response Policy for Single-arm Cluster Tools with Residency Time Constraints

Qiao, Y, Wu, NQ, Pan     More...

Qiao, Y, Wu, NQ, Pan, CR, Zhou, MC     Less

2014 IEEE INTERNATIONAL CONFERENCE ON SYSTEMS, MAN AND CYBERNETICS (SMC)[1062-922X], Published 2014, Volume 2014-January, Issue January, Pages 120-126

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4.Simulation Modeling and Visualization of Start-up Transient Processes of Dual-arm Cluster Tools with Wafer Revisiting

Pan, CR, Zhou, EC, Q     More...

Pan, CR, Zhou, EC, Qiao, Y, Wu, NQ     Less

2014 IEEE INTERNATIONAL CONFERENCE ON SYSTEMS, MAN AND CYBERNETICS (SMC)[1062-922X], Published 2014, Volume 2014-January, Issue January, Pages 133-138

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