1.Modeling and Control for Deadlock-Free Operation of Single-Arm Cluster Tools With Concurrently Processing Multiple Wafer Types via Petri Net

Lu, YJ, Qiao, Y, Pan     More...

Lu, YJ, Qiao, Y, Pan, CR, Chen, YF, Wu, NQ, Li, ZW, Liu, B     Less

IEEE ACCESS[2169-3536], Published 2021, Volume 9, Pages 70868-70883

收錄情况： WOS SCOPUS

WOS核心合集引用: 5  2023影響因子:  3.4  发表年影響因子:  3.476 

2.Petri Net-Based Efficient Determination of Optimal Schedules for Transport-Dominant Single-Arm Multi-Cluster Tools

Yang, FJ, Wu, NQ, Qi     More...

Yang, FJ, Wu, NQ, Qiao, Y, Zhou, MC, Su, R, Qu, T     Less

IEEE ACCESS[2169-3536], Published 2018, Volume 6, Pages 355-365

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WOS核心合集引用: 7  2023影響因子:  3.4  发表年影響因子:  4.098 

3.Optimal Scheduling of Complex Multi-Cluster Tools Based on Timed Resource-Oriented Petri Nets

Zhu, QH, Wu, NQ, Qia     More...

Zhu, QH, Wu, NQ, Qiao, Y, Zhou, MC     Less

IEEE ACCESS[2169-3536], Published 2016, Volume 4, Pages 2096-2109

收錄情况： WOS SCOPUS

WOS核心合集引用: 36  2023影響因子:  3.4  发表年影響因子:  3.244