1.Scheduling of Time-Constrained Single-Arm Cluster Tools with Two-Space Process Modules in Semiconductor Manufacturing

Zou, CY, Wang, GH, G     More...

Zou, CY, Wang, GH, Gu, L, Li, J, Wu, NQ, Qiao, Y     Less

IEEE ROBOTICS AND AUTOMATION LETTERS[2377-3766], Published 2024, Volume 9, Issue 7, Pages 6352-6359

收錄情况： WOS SCOPUS

WOS核心合集引用: 0  2023影響因子:  4.6 

2.Optimally Scheduling Dual-Arm Multi-Cluster Tools to Process Two Wafer Types

Zhu, QH, Wang, GH, H     More...

Zhu, QH, Wang, GH, Hou, Y, Wu, NQ, Qiao, Y     Less

IEEE ROBOTICS AND AUTOMATION LETTERS[2377-3766], Published 2022, Volume 7, Issue 3, Pages 5920-5927

收錄情况： WOS SCOPUS

WOS核心合集引用: 8  2023影響因子:  4.6  发表年影響因子:  5.2