1.Development of Fault Detection Systems Based on Big Data Ecosystem in Semiconductor Manufacturing: The Hadoop Ecosystem Implementation
Fu, HC, Qiao, Y, Bai
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Fu, HC, Qiao, Y, Bai, LP, Wu, NQ, Liu, B, He, YF
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IEEE ROBOTICS & AUTOMATION MAGAZINE[1070-9932],
Published 2023,
Volume 30,
Issue 2,
Pages 22-33
收錄情况:
WOS
SCOPUS
WOS核心合集引用: 2
2023影響因子:
6.1
发表年影響因子:
6.1