1.An Efficient Binary Integer Programming Model for Residency Time-Constrained Cluster Tools With Chamber Cleaning Requirements
Qiao, Y, Lu, YN, Li,
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Qiao, Y, Lu, YN, Li, J, Zhang, SW, Wu, NA, Liu, B
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IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING[1545-5955],
Published 2021,
Volume 19,
Issue 3,
Pages 1757-1771
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WOS核心合集引用: 17
2023影響因子:
5.9
发表年影響因子:
6.636