1.Wafer Delay and Cycle Time Minimization for Single-Arm Cluster Tools with Activity Time Variation Using NSGA-II and TOPSIS
Zeng, Shan, Liu, Men
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Zeng, Shan, Liu, Meng Ting, Qiao, Yan, Zhang, Si Wei, Cai, Si Mian, Wu, Nai Qi
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2025 IEEE International Conference on Networking, Sensing and Control (ICNSC)[1810-7869],
Published 2025,
Pages 287-292
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