1.Scheduling of Single-Arm Cluster Tools with Residency Time Constraints and Chamber Cleaning Operations

Li, J, Qiao, Y, Zhan     More...

Li, J, Qiao, Y, Zhang, SW, Li, ZW, Wu, NQ, Song, TR     Less

APPLIED SCIENCES-BASEL[2076-3417], Published 2021, Volume 11, Issue 19,

收錄情况： WOS SCOPUS

WOS核心合集引用: 7  2023影響因子:  2.5  发表年影響因子:  2.838 

2.Scheduling Cluster Tools with Multi-Space Process Modules and a Multi-Finger-Arm Robot in Wafer Fabrication Subject to Wafer Residency Time Constraints

Gu, L, Wu, NQ, Qiao,     More...

Gu, L, Wu, NQ, Qiao, Y, Zhang, SW, Li, T     Less

APPLIED SCIENCES-BASEL[2076-3417], Published 2024, Volume 14, Issue 20,

收錄情况： WOS SCOPUS

WOS核心合集引用: 0  2023影響因子:  2.5