1.Scheduling of Single-Arm Cluster Tools with Residency Time Constraints and Chamber Cleaning Operations
Li, J, Qiao, Y, Zhan
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Li, J, Qiao, Y, Zhang, SW, Li, ZW, Wu, NQ, Song, TR
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APPLIED SCIENCES-BASEL[2076-3417],
Published 2021,
Volume 11,
Issue 19,
收錄情况:
WOS
SCOPUS
WOS核心合集引用: 7
2023影響因子:
2.5
发表年影響因子:
2.838