1.Efficient Approach to Failure Response of Process Module in Dual-Arm Cluster Tools With Wafer Residency Time Constraints
Qiao, Y, Zhang, SW,
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Qiao, Y, Zhang, SW, Wu, NQ, Zhou, MC, Li, ZW, Qu, T
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IEEE TRANSACTIONS ON SYSTEMS MAN CYBERNETICS-SYSTEMS[2168-2216],
Published 2021,
Volume 51,
Issue 3,
Pages 1612-1629
收錄情况:
WOS
SCOPUS
WOS核心合集引用: 7
2022影響因子:
8.7
发表年影響因子:
11.471