1.Cluster tool apparatus and a method of controlling a cluster tool apparatus

Naiqi Wu, Fajun Yang     More... Naiqi Wu, Fajun Yang, Yan Qiao, Mengchu Zhou, Zhiwu Li     Less

專利權人: Macau University Of     More... Macau University Of Science And Technology     Less

申請號: US15263615 申請日: 2016/9/13

公開（公告）號: US10643873B2 公開（公告）日期: 2020/5/5

IPC分類號: H01L21/67; G05B19/418; H01L21/677

法律狀態: 未缴年费

同族信息: US10643873B2; US20180076064A1

2.Multi cluster tool system and a method of controlling a multi tool cluster system

Naiqi Wu, Fajun Yang     More... Naiqi Wu, Fajun Yang, Liping Bai, Mengchu Zhou, Zhiwu Li     Less

專利權人: Macau University Of     More... Macau University Of Science And Technology     Less

申請號: US15268851 申請日: 2016/9/19

公開（公告）號: US10520914B2 公開（公告）日期: 2019/12/31

IPC分類號: G05B19/29; G05B19/418

法律狀態: 未缴年费

同族信息: US20180081336A1; US10520914B2

3.Cluster tool apparatus and a method of controlling a cluster tool apparatus

Yan Qiao, Mengchu Zh     More... Yan Qiao, Mengchu Zhou, Naiqi Wu, Zhiwu Li, Qinghua Zhu     Less

專利權人: Macau University Of     More... Macau University Of Science And Technology     Less

申請號: US15272706 申請日: 2016/9/22

公開（公告）號: US10134613B2 公開（公告）日期: 2018/11/20

IPC分類號: H01L21/677; H01L21/67

法律狀態: 未缴年费

同族信息: US20180082878A1; US10134613B2

4.System and method for determining an optimized schedule of a production line

Naiqi Wu, Fajun Yang     More... Naiqi Wu, Fajun Yang, Yan Qiao, Mengchu Zhou     Less

專利權人: Macau University Of     More... Macau University Of Science And Technology     Less

申請號: US14920026 申請日: 2015/10/22

公開（公告）號: US10101721B2 公開（公告）日期: 2018/10/16

IPC分類號: G05B19/04; G05B19/042; G05B19/41; G05B19/418

法律狀態: 未缴年费

同族信息: US20170115651A1; US10101721B2

5.System for controlling a power transmission system

Zhiwu Li, Zhongyuan     More... Zhiwu Li, Zhongyuan Jiang, Naiqi Wu, Mengchu Zhou     Less

專利權人: Macau University Of     More... Macau University Of Science And Technology     Less

申請號: US15078367 申請日: 2016/3/23

公開（公告）號: US10103569B2 公開（公告）日期: 2018/10/16

IPC分類號: H02J7/00; G01R31/40; H02J9/06

法律狀態: 未缴年费

同族信息: US10103569B2; US20170279298A1

6.Petri net-based optimal one-wafer cyclic scheduling of treelike hybrid multi-cluster tools

Naiqi Wu, Fajun Yang     More... Naiqi Wu, Fajun Yang, Yan Qiao, Mengchu Zhou     Less

專利權人: Macau University Of     More... Macau University Of Science And Technology     Less

申請號: US14919720 申請日: 2015/10/21

公開（公告）號: US10073444B2 公開（公告）日期: 2018/9/11

IPC分類號: G05B19/41; G05B19/418

法律狀態: 未缴年费

同族信息: US10073444B2; US20170083009A1

7.Optimally scheduling of close-down process for single-arm cluster tools with wafer residency time constraints

Naiqi Wu, Qinghua Zh     More... Naiqi Wu, Qinghua Zhu, Mengchu Zhou, Yan Qiao     Less

專利權人: Macau University Of     More... Macau University Of Science And Technology     Less

申請號: US14918564 申請日: 2015/10/21

公開（公告）號: US10001772B2 公開（公告）日期: 2018/6/19

IPC分類號: G05B19/418

法律狀態: 授权

同族信息: US20170083010A1; US10001772B2

8.Optimal one-wafer scheduling of single-arm multi-cluster tools with tree-like topology

Naiqi Wu, Qinghua Zh     More... Naiqi Wu, Qinghua Zhu, Yan Qiao, Mengchu Zhou     Less

專利權人: Macau University Of     More... Macau University Of Science And Technology     Less

申請號: US14918577 申請日: 2015/10/21

公開（公告）號: US10001773B2 公開（公告）日期: 2018/6/19

IPC分類號: G05B19/41; G05B19/418

法律狀態: 授权

同族信息: US10001773B2; US20170083008A1

9.Scheduling start-up process for time-constrained single-arm cluster tools

Naiqi Wu, Yan Qiao,     More... Naiqi Wu, Yan Qiao, Mengchu Zhou     Less

專利權人: Macau University Of     More... Macau University Of Science And Technology     Less

申請號: US14918557 申請日: 2015/10/20

公開（公告）號: US9618930B1 公開（公告）日期: 2017/4/11

IPC分類號: G05B19/418; B25J9/16; H01L21/67; H01L21/677; H01L21/68

法律狀態: 授权

同族信息: US9618930B1; US20170080563A1

10.A MULTI CLUSTER TOOL SYSTEM AND A METHOD OF CONTROLLING A MULTI TOOL CLUSTER SYSTEM

Wu Naiqi, Yang Fajun     More... Wu Naiqi, Yang Fajun, Bai Liping, Zhou Mengchu, Li Zhiwu     Less

專利權人: Macau University Of     More... Macau University Of Science And Technology     Less

申請號: AU2016101672 申請日: 2016/9/19

公開（公告）號: AU2016101672A4 公開（公告）日期: 2016/10/27

IPC分類號: H01L21/67; B25J9/00

法律狀態: 权利终止

同族信息: AU2016101672A4

11.A CLUSTER TOOL APPARATUS AND A METHOD OF CONTROLLING A CLUSTER TOOL APPARATUS

Qiao Yan, Zhou Mengc     More... Qiao Yan, Zhou Mengchu, Wu Naiqi, Li Zhiwu, Zhu Qinghua     Less

專利權人: Macau University Of     More... Macau University Of Science And Technology     Less

申請號: AU2016101706 申請日: 2016/9/22

公開（公告）號: AU2016101706A4 公開（公告）日期: 2016/10/20

IPC分類號: H01L21/02; G05B19/418

法律狀態: 权利终止

同族信息: AU2016101706A4

12.A CLUSTER TOOL APPARATUS AND A METHOD OF CONTROLLING A CLUSTER TOOL APPARATUS

Wu Naiqi, Yang Fajun     More... Wu Naiqi, Yang Fajun, Qiao Yan, Zhou Mengchu, Li Zhiwu     Less

專利權人: Macau University Of     More... Macau University Of Science And Technology     Less

申請號: AU2016101610 申請日: 2016/9/13

公開（公告）號: AU2016101610A4 公開（公告）日期: 2016/10/13

IPC分類號: H01L21/67

法律狀態: 权利终止

同族信息: AU2016101610A4

13.Optimization of start-up transient processes for dual-armed cluster tools with wafer revisiting

Naiqi Wu, Mengchu Zh     More... Naiqi Wu, Mengchu Zhou, Chunrong Pan, Yan Qiao     Less

專利權人: Macau University Of     More... Macau University Of Science And Technology     Less

申請號: US14639960 申請日: 2015/3/5

公開（公告）號: US9333645B1 公開（公告）日期: 2016/5/10

IPC分類號: G05D3/12; B25J9/00; G05B19/418; G06F17/50

法律狀態: 未缴年费

同族信息: US9333645B1

14.A SYSTEM FOR CONTROLLING A POWER TRANSMISSION SYSTEM

Li Zhiwu, Jiang Zhon     More... Li Zhiwu, Jiang Zhongyuan, Wu Naiqi, Zhou Mengchu     Less

專利權人: Macau University Of     More... Macau University Of Science And Technology     Less

申請號: AU2016100316 申請日: 2016/3/23

公開（公告）號: AU2016100316A4 公開（公告）日期: 2016/5/5

IPC分類號: G01R31/00; H02H7/26

法律狀態: 权利终止

同族信息: AU2016100316A4

15.Optimal buffer space configuration and scheduling for single-arm multi-cluster tools

Liping Bai, Naiqi Wu     More... Liping Bai, Naiqi Wu, Zhiwu Li, Mengchu Zhou     Less

專利權人: Macau University Of     More... Macau University Of Science And Technology     Less

申請號: US14639137 申請日: 2015/3/5

公開（公告）號: US9227318B1 公開（公告）日期: 2016/1/5

IPC分類號: G06F19/00; B25J9/00; G05B19/418; G06F17/50

法律狀態: 授权

同族信息: US9227318B1

16.Method for scheduling single-arm cluster tools with wafer revisiting and residency time constraints

Naiqi Wu, Fajun Yang     More... Naiqi Wu, Fajun Yang, Yan Qiao, Mengchu Zhou     Less

專利權人: Macau University Of     More... Macau University Of Science And Technology     Less

申請號: US14639980 申請日: 2015/3/5

公開（公告）號: US9223307B1 公開（公告）日期: 2015/12/29

IPC分類號: G06F19/00; B25J9/00; G05B19/418; G06F17/50

法律狀態: 未缴年费

同族信息: US9223307B1

17.A SYSTEM AND METHOD FOR DETERMINING AN OPTIMIZED SCHEDULE OF A PRODUCTION LINE

Wu Naiqi, Yang Fajun     More... Wu Naiqi, Yang Fajun, Qiao Yan, Zhou Mengchu     Less

專利權人: Macau University Of     More... Macau University Of Science And Technology     Less

申請號: AU2015101569 申請日: 2015/10/22

公開（公告）號: AU2015101569A4 公開（公告）日期: 2015/11/26

IPC分類號: G05B19/418

法律狀態: 权利终止

同族信息: AU2015101569A4

18.Optimal Buffer Space Configuration and Scheduling for Single-Arm Multi-cluster Tools

Bai Liping, Wu Naiqi     More... Bai Liping, Wu Naiqi, Li Zhiwa, Zhou Mengchu     Less

專利權人: Macau University Of     More... Macau University Of Science And Technology     Less

申請號: AU2015100136 申請日: 2015/2/7

公開（公告）號: AU2015100136A4 公開（公告）日期: 2015/3/12

IPC分類號: G05B19/00; H01L21/67; H01L21/677

法律狀態: 权利终止

同族信息: AU2015100136A4

19.Optimization of Start-up Transient Processes for Dual-Armed Cluster Tools with Wafer Revisiting

Wu Naiqi, Zhou Mengc     More... Wu Naiqi, Zhou Mengchu, Pan Churong, Qiao Yan     Less

專利權人: Macau University Of     More... Macau University Of Science And Technology     Less

申請號: AU2015100137 申請日: 2015/2/7

公開（公告）號: AU2015100137A4 公開（公告）日期: 2015/3/5

IPC分類號: G06F9/00; H01L21/00

法律狀態: 权利终止

同族信息: AU2015100137A4

20.Method for Scheduling Single-arm Cluster Tools with Wafer Revisiting and Residency Time Constraints

Wu Naiqi, Yang Fajun     More... Wu Naiqi, Yang Fajun, Yan Qiao, Zhou Mengchu     Less

專利權人: Macau University Of     More... Macau University Of Science And Technology     Less

申請號: AU2015100138 申請日: 2015/2/7

公開（公告）號: AU2015100138A4 公開（公告）日期: 2015/3/5

IPC分類號: H01L21/67; H01L21/00; H01L21/302

法律狀態: 权利终止

同族信息: AU2015100138A4